Kubitsa
Wunguke ubushishozi kandi wihutishe inzira yiterambere.
Iterambere ryambere ritanga amashanyarazi no kugenzura ibisubizo byingirakamaro ya firime yoherejwe hamwe nibikoresho bya geometrike.Kugira ngo ukemure ibibazo byo gutunganya wafer, ibisubizo byukuri byo guhindura imbaraga bigufasha guhitamo imbaraga zukuri, neza, umuvuduko, hamwe nuburyo bwo gusubiramo.
Dutanga umurongo mugari wa radiyo ya RF, sisitemu ya DC, sisitemu yihariye itanga ingufu, tekinoroji ihuye, hamwe na fibre optique yo kugenzura ubushyuhe bugufasha rwose kugenzura neza plasma.Turahuza kandi Byihuta DAQ ™ hamwe no kubona amakuru hamwe na suite yo kugerwaho kugirango dutange ubushishozi kandi byihute mubikorwa byiterambere.
Wige byinshi kubyerekeranye na semiconductor yo gukora kugirango ubone igisubizo gihuye nibyo ukeneye.
Ikibazo cyawe
Kuva kuri firime zikoreshwa mugushushanya ibipimo byumuzunguruko kugeza kuri firime ikora kandi ikingira (ibyuma byamashanyarazi), kugeza kumafirime yicyuma (guhuza imiyoboro), uburyo bwawe bwo kubitsa busaba kugenzura urwego rwa atome - ntabwo kuri buri kintu gusa ahubwo no muri wafer yose.
Kurenga imiterere ubwayo, firime yawe wabitswe igomba kuba nziza.Bakeneye gutunga ingano zifuzwa, uburinganire, hamwe nubunini bujyanye, kandi ntibigire ubusa - kandi ibyo byiyongeraho no gutanga imashini zikenewe (compressive na tensile) hamwe numuriro w'amashanyarazi.
Ingorabahizi zikomeje kwiyongera gusa.Kugira ngo ukemure imbogamizi za lithographie (sub-1X nm node), tekinike yo kwikuramo kabiri na kane yerekana uburyo bwo kubitsa kugirango ubyare kandi ubyare icyitegererezo kuri buri wafer.
Igisubizo cyacu
Iyo ukoresheje uburyo bukomeye bwo kubitsa hamwe nibikoresho bya geometrike, ukeneye umuyobozi wizewe.
Iterambere ryingufu za RF itanga amashanyarazi hamwe nubuhanga bwihuse bwo guhuza tekinoroji bigushoboza guhitamo no guhuza neza imbaraga zukuri, neza, umuvuduko, hamwe nibisubirwamo bisabwa kubikorwa byose byateye imbere bya PECVD na PEALD.
Koresha tekinoroji ya generator ya DC kugirango uhuze neza igisubizo cya arc gishobora kugaragara, imbaraga zukuri, umuvuduko, hamwe nibisubirwamo bisabwa PVD (sputtering) hamwe na ECD yo kubitsa.
Inyungu
Kuzamura plasma ihamye hamwe nuburyo bwo gusubiramo byongera umusaruro
Delivery Gutanga neza RF na DC hamwe nigenzura ryuzuye rya digitale bifasha kunoza imikorere
Response Igisubizo cyihuse kumahinduka ya plasma nubuyobozi bwa arc
● Urwego rwinshi rutera hamwe na adaptive frequency tuning itunganya igipimo cya etch
Support Inkunga yisi yose irahari kugirango tumenye igihe ntarengwa nigikorwa cyibicuruzwa